Mega™ Batch Cleaning System

• Multiple Cleaning Technologies for Process Flexibility
• Fast cycle times
• Environmentally friendly operation with solvents
• No liquid waste streams
• Ionic contamination detection
• Statistical process control
• Ideal for high reliability applications
• Small footprint
• Easy to operate
• Designed for safety

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Chemistry Product Guide

   
 

Austin American Technology's Mega™ cleaners are designed for high reliability, environmentally-friendly, solvent-based cleaning applications. These closed-loop, solvent regenerative systems feature quantitative ionic contamination detection and statistical process control capability.

Wash and rinse cycles incorporate a highly effective spray under immersion process with strategically located venturi nozzles for maximum cleaning efficiency. Agitation can be controlled to handle sensitive wire-bonded substrates or difficult to clean, tightly-spaced flip chip technology. Ultrasonics are available for additional cleaning power.

Safety is designed into the Mega series. The process chamber is always empty when not in use and must be closed and latched before the cleaning cycle begins. Solvent replenishment is automated so the operator is never in contact with wash fluid during normal operation. At the end of the cleaning cycle, the process tank drains into an integral holding tank at a controlled rate to minimize dragout. At the end of the dry cycle, the process chamber is clean, dry and free of solvent.

The entire cleaning process (wash, rinse, dry) typically takes only 10-20 minutes. For maximum drying, the heated Vortex option is available.